The Self-Sensing Nanopipette (SSN) is a device that enables scanning probe lithography at zepto-liter volumes. In other words, by using the same technique that enables Atomic Force Microscopy or AFM, the SSN can image surfaces and find orientation on it. When arrived at the desired position, it can aspirate and inject liquids with zepto-liter precision. Two on-chip reservoirs provide the supply of dispensable liquids. Furthermore, with the addition of piezoresistive layers on top of the capillaries of the probe, the SSN has become self-sensing. This addition has eliminated the need for the more often traditionally used off-chip laser deflection method.
Solidworks renderings were made for a better insight on the fabrication process steps and the resulting device.
The resulting measurements were depicted in an animated GIF, to show the deflection at the time of measurement.